Negative Schottky barrier height and surface inhomogeneity in n-silicon M–I–S structures

نویسندگان

چکیده

The alleviation effect on the Schottky barrier height (SBH) (ΦB) using ultrathin titanium dioxide and hafnium dielectrics in a single layer bilayer stack was demonstrated. ΦB Pt/n-Si contact reduced from 0.53 to −0.058, 0.3, −0.12 eV 3 nm TiO2, 1 HfO2, high-k/high-k insertion, respectively. A maximum of 122% reduction obtained dielectric which is highest ever reported so far diode. This achieved by effectively passivating semiconductor surface states HF cleaning followed inserting an film produced novel Atomic Layer Deposition (ALD) technique. Gaussian distribution (GD) heights all over interface has been investigated for both Metal–Semiconductor (M–S) Metal–Insulator–Semiconductor (M–I–S) contacts. nonlinear behavior conventional Richardson plot observed with lower values constant (A*). We have inhomogeneity M–S M–I–S contacts through temperature dependency diode characteristics. standard deviation (σ) as evidence determined ln(Is/T2) vs q/2kT plot. results were validated modified where A* found be close agreement known values. As ALD technique conformity uniformity thin films, insertion proved effective mitigating SBH. However, points role dipole formation at interface.

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ژورنال

عنوان ژورنال: AIP Advances

سال: 2022

ISSN: ['2158-3226']

DOI: https://doi.org/10.1063/5.0095003